Design, Modeling and Optimization of a Multilayer Thin-film Pzt Diaphragm Used in Pressure Sensor

Piezoelectric Pressure Sensor Based on Enhanced Thin-Film PZT Diaphragm Containing Nanocrystalline Powders

Design of High Sensitivity and Linearity Microelectromechanical Systems Capacitive Tire Pressure Sensor using Stepped Membrane

This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output.First the structures of two capacitive pressure sensors with clamped square flatdiaphragms, with different thicknesses are inv...

Modeling of capacitance and sensitivity of a MEMS pressure sensor

In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM).  It can b...

Simulation and Modeling of a High Sensitivity Micro-electro-mechanical Systems Capacitive Pressure Sensor with Small Size and Clamped Square Diaphragm

This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...

Synthetic jets with piezoelectric diaphragms [5761-32]

Piezoelectric diaphragms are used as synthetic jets because of their size, rapid time response, and relatively low power consumption. Among the piezoelectric diaphragms used are unimorphs and Bimorphs. In this study, a bimorph diaphragm, a thin Unimorph pre-stressed device and a Radial Field Diaphragm (RFD) are compared. A bimorph consists of two bonded PZT discs, a thin Unimorph pre-stressed d...